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Theory and Fabrication of Integrated Circuits University of Illinois at Urbana-Champaign logo

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The lecture portion of ece444 introduces students to the fundamental theory of integrated circuit fabrication.

Objectives for the course:

• CourseObjectives.pdf (99kB)
• CourseObjectives.doc (34kB)

Topics discussed:

1. Processing overview
2. The silicon wafer
3. Oxidation
4. Photolithography
5. Etching processes
6. Junction Diffusion
7. Bipolar transistor design
8. Diffusion related processes
9. Chemical vapor deposition
10. Ion beam processing

Lecture Figures Download and print these figures to help with lecture notes.

Other Courses

Recommended courses to further your career in IC processing.

Supplements Additional information to be studied outside of class.

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Department of Electrical and Computer Engineering
College of Engineering
University of Illinois Urbana-Champaign

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