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Theory and Fabrication of Integrated Circuits University of Illinois at Urbana-Champaign logo HOME ·
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Power Failure
In the Event of a Power Failure, Turn Off:
- all computers
- steppers - the stage may potentially lose track of position and run away
- cascade Rinses - A flood might occur if they're left on
- furnaces
- turn off breakers for the individual furnaces
- open the side doors for ventilation
- fume hoods - leave the sashes open! Just evacuate the wet lab.
- note: The acid hood fan is 25HP! It is powerful enough to potentially damage closed sashes.
- air handlers - no action, they will be taken care of by F&S
- DI system circulation pumps - one has a switch, the other must be unplugged
- hydrogen and oxygen tank valves - This is only precautionary until the alarm system is back on-line
If the power is still out after 15 minutes, students should leave the lab before fumes from the chemicals could build up.
Restoration of Power Means Everything Can Be Turned Back On:
but note the following:
- check the hydrogen detection system to ensure there are no faults
- e-mail the lab director with a short report of what happened
Lab Safety
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·Power Outage
· Safety Handout
In case of emergency, always call 9-911 and give the following information:
·Your name
·Location:
IC Fabrication Laboratory
Room 50Q
Basement of Everitt Lab
1406 W. Green St.
·Specific information about the emergency
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College of Engineering
University of Illinois Urbana-Champaign
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