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Theory and Fabrication of Integrated Circuits
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Hydrogen Alarms

Hydrogen is a highly flammable and explosive gas; therefore a hydrogen alarm has been installed in the ECE444 laboratory to monitor hydrogen levels.

There are 2 levels of alarms reported by the Hydrogen Detection System located by the main glass doors to the lab:

Alarm Level 1

  • Prepare to evacuate the lab

If the concentration of H2 exceeds 5% of the LEL (lower explosive limit) alarm level one is activated.

This alarm level is local only (Sonalert annunciates, beacon light activated) and allows the TA a window of time to evaluate the lab for gross leaks or simple mistakes.

Alarm Level 2

  • Evacuate the building immediately

If the concentration of H2 exceeds 10% of the LEL alarm two is activated.

This is a building wide alarm which activates the lab and building fire alarm. Hydrogen levels are dangerously high and an explosion could occur.

Local Furnace H2 Alarm

  • Notify a TA

The oxidation furnaces have built-in flow meters which determine the amounts of O2 and H2 injected into the furnace. If too much H2 is injected, a local alarm at the furnace will sound.

The gas controller fails-over to a safe condition, so no evacuation is needed.

Lab Safety

· Chemical Hygiene Plan

· MSDSs

· Evacuation Routes

· Fire Alarms

·Hydrogen Alarms

· Injuries

· Personal Protective Equipment

· Power Outage

· Safety Handout

In case of emergency, always call 9-911 and give the following information:

·Your name

·Location:
IC Fabrication Laboratory
Room 50Q
Basement of Everitt Lab
1406 W. Green St.

·Specific information about the emergency

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Department of Electrical and Computer Engineering
College of Engineering
University of Illinois Urbana-Champaign

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