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Theory and Fabrication of Integrated Circuits University of Illinois at Urbana-Champaign logo
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Fire Alarms
Response Procedure for General Fires :
- evacuate the lab in an orderly fashion (see evacuation routes)
- activate a fire alarm once away from immediate danger
Response Procedure for Fires in 50J (Photolithography Lab)
An HFC-125 fire suppression system is employed in the photolithography lab to minimize damage to equipment in case of a fire. HFC-125 suppresses fire by absorbing heat energy at a higher rate than the amount of heat generated by the fire, preventing the fire from sustaining itself.
The HFC-125 system is automatic. In the event a detector senses the presence of fire, a warning alarm will sound 30 seconds prior to the release of the suppression agent. During this 30 second warning, release of the agent can be halted by pressing the bypass button (in the case of a false alarm). Otherwise, after the 30 second warning the main fire alarm for building will be activated and the HFC-125 will be released into the room.
Lab Safety
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·Fire Alarms
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· Safety Handout
In case of emergency, always call 9-911 and give the following information:
·Your name
·Location:
IC Fabrication Laboratory
Room 50Q
Basement of Everitt Lab
1406 W. Green St.
·Specific information about the emergency
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College of Engineering
University of Illinois Urbana-Champaign
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