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ece444: Theory and Fabrication of Integrated Circuits     title    
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Lecture:


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The lecture portion of ece444 introduces students to the fundamental theory of integrated circuit fabrication.

Topics discussed:

  1. Processing overview
  2. The silicon wafer
  3. Oxidation
  4. Photolithography
  5. Etching processes
  6. Junction Diffusion
  7. Bipolar transistor design
  8. Diffusion related processes
  9. Chemical vapor deposition
  10. Ion beam processing
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Electrical and Computer Engineering Department
University of Illinois Urbana-Champaign     UIUC Logo    
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