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ece444: Theory and Fabrication of Integrated Circuits     title
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The ece444 laboratory contains a full array of silicon processing tools.

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As a result of years of teaching excellence, the laboratory has acquired a full array of equipment, including:

Step and repeat projection aligners
High temperature furnaces
Evaporators
Wet etching hoods
an extensive array of metrology tools
Electrical test benches

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Electrical and Computer Engineering Department
University of Illinois Urbana-Champaign UIUC Logo

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