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ECE444: Theory and Fabrication of Integrated Circuits   http://ece.uiuc.edu
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Indiffusing Dopant Type
Diffusion Type
xj (μm)
buried layer x (μm)
Nsurface (cm-3)
Nc (cm-3

avg σ (Ω-cm)-1 =
Rs (Ω/sq) =

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Electrical and Computer Engineering Department
University of Illinois Urbana-Champaign
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