Warning! This is an archived version of the 2005 site.   
ECE444: Theory and Fabrication of Integrated Circuits   http://ece.uiuc.edu    
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LECTURE:    

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AD Accounts   

The lecture portion of ece444 introduces students to the fundamental theory of integrated circuit fabrication.

Topics discussed:

1. Processing overview
2. The silicon wafer
3. Oxidation
4. Photolithography
5. Etching processes
6. Junction Diffusion
7. Bipolar transistor design
8. Diffusion related processes
9. Chemical vapor deposition
10. Ion beam processing

© 2004, 2005: ECE444   
Electrical and Computer Engineering Department   
University of Illinois Urbana-Champaign   
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