Warning! This is an archived version of the 2005 site.   
ECE444: Theory and Fabrication of Integrated Circuits   http://ece.uiuc.edu    
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The ece444 laboratory contains a full array of silicon processing tools.

As a result of years of teaching excellence, the laboratory has acquired a full array of equipment, including:

  • Step and repeat projection aligners
  • High temperature furnaces
  • Evaporators
  • Wet etching hoods
  • an extensive array of metrology tools
  • Electrical test benches
© 2004, 2005: ECE444   
Electrical and Computer Engineering Department   
University of Illinois Urbana-Champaign   
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