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ECE444: Theory and Fabrication of Integrated Circuits   http://ece.uiuc.edu    
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The ece444 laboratory contains a full array of silicon processing tools.

As a result of years of teaching excellence, the laboratory has acquired a full array of equipment, including:

• Step and repeat projection aligners
• High temperature furnaces
• Evaporators
• Wet etching hoods
• an extensive array of metrology tools
• Electrical test benches

© 2004, 2005: ECE444   
Electrical and Computer Engineering Department   
University of Illinois Urbana-Champaign   
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