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Student Preparations for Lab
The ECE 344 lab grade has to be closely correlated to your preparedness in order to serve as motivation since the health of yourself, the other students, and the equipment depend upon your competence.
The following schedule and related links will help you to be prepared.
- MEETING 1 - Yes, the LAB DOES MEET THE FIRST WEEK!!!!! (If you miss it, attend another lab section and contact your lab instructor.)
- The instructor will touch on the following in lab, but the following screens contain more detail.
- MEETING 2 - First week of Processing.
- Be prepared by reading the screens and doing the prelab for your group BEFORE class.
- Group 1
- Group 2
-
IC-CAP Tutorial Prelab due.
- Starting point at IC-CAP Tutorial.
- You are not likely to finish the modeling, but that's O.K. It will become filler work for later on when you have to wait during a furnace operation or when it's too late in the lab period to start a PR process.
- Group 3
- MEETING 3
-
- Group 1
- Group 2
- Group 3
-
IC-CAP Tutorial Prelab due.
- Starting point at IC-CAP Tutorial.
- You are not likely to finish the modeling, but that's O.K. It will become filler work for later on when you have to wait during a furnace operation or when it's too late in the lab period to start a PR process.
- MEETING 4
-
- Group 1
-
IC-CAP Tutorial Prelab due.
- Starting point at IC-CAP Tutorial.
- You are not likely to finish the modeling, but that's O.K. It will become filler work for later on when you have to wait during a furnace operation or when it's too late in the lab period to start a PR process.
- Group 2
- Group 3
- MEETING 5
- No more groups. Now everyone should be on their own and it's first come first serve for the equipment. You may arrive up to a half hour early from now on.
- Probable starting point is at Boron Predep.
- Probable ending point is before Photoresist # 2.
- Be sure to "submit" your logsheet file within 24 hours of gathering new process data from now on.
- MEETING 6
- Probable starting point is at Photoresist # 2.
- Probable ending point is before Photoresist # 3.
- Be sure to "submit" your logsheet file within 24 hours of gathering new process data.
- MEETING 7
- The report for the IC-CAP Tutorial will probably be due this week. Be sure to "submit" the model file from your ICCAP tutorial before class.
- MEETING 8
-
- MEETING 9
- The Processing Report will probably be due this week.
- Be ready to use ICCAP to test your IC wafer!
- MEETING 10
- Since there are only 5 test stations, the first 5 students will get them. Anyone else who finishes processing, should go the Engineering Workstation Lab and learn more about IC-CAP. Many of the plots called for in the final report can be prepared in large part ahead of time.
- MEETING 11
- Continue testing the IC wafer. If you don't get a test station, let your instructor know so you can definitely get one next week.
- MEETING 12
- Continue testing the IC wafer. If you don't get a test station, let your instructor know so you can definitely get one next week.
-
- Have you finished the ellipsometer measurements of all the oxide thicknesses yet?
- MEETING 13
- Continue testing the IC wafer. If everyone has finished testing the basic device types, we'll begin a round of testing on a selection of the other structures. Check the newsgroup for the latest information.
- MEETING 14
- Continue testing the IC wafer.
- MEETING 15
- Finish testing and "submit" your logsheet and ICCAP files. The electronic files will usually be due before the written report, but your instructor will announce the due dates.
- MEETING 16 - Finals week.
- A laboratory oriented exam will be administered at the time and place scheduled for the lecture section(s) final exam. Everything in the lab manual will be fair game. The exam will determine who knew what they were doing in the lab and why.
This screen was created by Mike Fitzimmons - U of Illinois ECE Dept. - mikef@uiuc.edu,
and is maintained by Kevin Beernink - U of Illinois ECE Dept. - beernink@uiuc.edu
E-mail comments and suggestions to ece344@uiuc.edu or use the FEEDBACK FORM.
preparations.html updated 05/14/96
Warning! This is the archived 1999 Fabweb site! Here is the latest site