UIUC ECE Title Bar     ece444
Theory and Fabrication of Integrated Circuits     University of Illinois at Urbana-Champaign logo

HOME · LECTURE · LAB · GT · CALCULATORS · Text Only    

DIFCAD · erfc · GROVE · IRVIN    

Diffusion Conditions   
Indiffusing Dopant Type      n 
 p     
Diffusion Type      Predep (erfc) 
 Drive (Gaussian)     
x_j (μm)        
buried layer x (μm)        
N_surface (cm^-3)        
N_c (cm^-3        
   
Solution    
avg σ (Ω-cm)^-1 =       
R_s (Ω/sq) =       

IRVIN.net

Input parameters into the calculator to the left, then press Calculate. The values for average σ and R_s will be calculated and displayed in the Solution pane to the left.

About Irvin.net

Irvin.net is a utility for calculating average conductivity (σ) for diffused layers.

In his original formula to calculate sheet restistance, Irvin used the idea that 1/ρ ≈ β*Nα for some constants α and β. He fitted experimental data to this function in a piecewise manner.

For more detail see his original work in the Bell Systems Technical Journal, March 1962.

Answers provided by this service may not be relevant to the materials presented in this website.

Department of Electrical and Computer Engineering
College of Engineering
University of Illinois Urbana-Champaign

Contact ece444
Copyright © 2007, 2008, 2009, 2010, 2011, 2012 The Board of Trustees at the University of Illinois. All rights reserved.

archives: ©1999   ©2000   ©2004   ©2005   ©2006