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Prometrix FT-650 Film Thickness Measurement

Description     Operation    

The Prometrix FT-650 Film Thickness Probe uses the CARIS technique (Constant Angle Reflection Spectroscopy) to accurately and quickly measure thin films. This technique uses a white light source to illuminate the sample and measures the reflected light intensity over the range of 400nm - 800nm. The incident light and reflected light combine with resulting constructive/ destructive interference, producing maxima/minima values in the spectrum. The intensity versus wavelength values are then used to calculate film thickness.

Process Equipment

· Gaertner Ellipsometer

· Evaporator (CVE)

· Evaporator (LDS)

· Filmetrics FT-20

· Prometrix FT650

· Four Point Probe (LDS)

· Four Point Probe (Veeco)

· Furnace

· Plasma Asher

· Spin-Rinse-Dryer

· Stepper (Nikon)

· Stepper (Ultratech)

· Probe Stations

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