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Gaertner L117 Ellipsometer

Description     Operation    

Ellipsometry is used to measure the optical properties and thickness of thin films using the change in polarization state of a reflected polarized beam illuminating the sample surface.

For more detailed information see (links will open in a new window):

• Gaertner L116 Product page
• Gaertner Tutorial
• J.A. Woollam Tutorial
• Horiba Jobin Yvon Tutorial

Process Equipment

· Gaertner Ellipsometer

· Evaporator (CVE)

· Evaporator (LDS)

· Filmetrics FT-20

· Prometrix FT650

· Four Point Probe (LDS)

· Four Point Probe (Veeco)

· Furnace

· Plasma Asher

· Spin-Rinse-Dryer

· Stepper (Nikon)

· Stepper (Ultratech)

· Probe Stations

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